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      Shenzhen three and wave of Electrical and Mechanical Technology Co., Ltd

      400 0061 1152CN
      Atmospheric Pressure
      • 5L vertical stainless steel RF matching integrated vacuum plasma cleaning machin

      5L vertical stainless steel RF matching integrated vacuum plasma cleaning machin

      Category:Atmospheric Pressure

      Introduction: 5L vertical stainless steel RF matching integrated vacuum plasma cleaning machine (high version)

      Service Hotline:400 0061 1152

      Buy NowOnline consultation

      • Features
      • Application

      Features

      PT-5ST

      Cavity material: stainless steel surface treatment

      Power supply: AC220V

      Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

      RF power supply: 0-300W adjustable (RF matching integrated)

      RF frequency: 13.56MHz

      Frequency offset: less than 0.2KHz

      Characteristic impedance: 50 ohms, automatic matching

      Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

      Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

      Gas flow rate: 10-300ml/min (adjustable)

      Process control: PLC man-machine interface automatic and manual mode

      Cleaning time: 1-99999 seconds adjustable

      Power size 10%-100% adjustable

      Inner cavity size Φ150×270Lmm 5L

      Dimensions: 560 × 540 × 1250mm L × W × H

      Vacuum pump: 2XZ-4 (pumping speed 2L/S)

      Vacuum chamber temperature: less than 30 ° C

      Cooling method: forced air cooling

      Features

      PT-5ST

      Cavity material: stainless steel surface treatment

      Power supply: AC220V

      Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

      RF power supply: 0-300W adjustable (RF matching integrated)

      RF frequency: 13.56MHz

      Frequency offset: less than 0.2KHz

      Characteristic impedance: 50 ohms, automatic matching

      Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

      Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

      Gas flow rate: 10-300ml/min (adjustable)

      Process control: PLC man-machine interface automatic and manual mode

      Cleaning time: 1-99999 seconds adjustable

      Power size 10%-100% adjustable

      Inner cavity size Φ150×270Lmm 5L

      Dimensions: 560 × 540 × 1250mm L × W × H

      Vacuum pump: 2XZ-4 (pumping speed 2L/S)

      Vacuum chamber temperature: less than 30 ° C

      Cooling method: forced air cooling

      Related Products

      Order:5L vertical stainless steel RF matching integrated vacuum plasma cleaning machin

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